氮氩流量比对AlCrTiVNbN薄膜结构和摩擦学性能的影响  

Effect of Flow Ratios of Nitrogen and Argon on Microstructure and Tribological Properties of AlCrTiVNbN Film

作　　者：阎红娟 米智丰 郑彩丽 司丽娜 程方赢 YAN Hongjuan;MI Zhifeng;ZHENG Caili;SI Lina;CHENG Fangying(School of Mechanical and Materials Engineering,North China University of Technology,Beijing 100144,China)

机构地区：[1]北方工业大学机械与材料工程学院,北京100144

出　　处：《润滑与密封》2025年第4期31-39,共9页Lubrication Engineering

基　　金：北京市自然科学基金项目(3212003);北方工业大学毓优团队计划项目(22XN746)。

摘　　要：通过磁控溅射方法在304不锈钢表面制备AlCrTiVNbN高熵合金氮化物薄膜,探究在不同氮氩流量比下薄膜的微观组织结构、力学性能和摩擦学性能。结果表明:随着氮氩流量比增加,AlCrTiVNbN薄膜呈现面心立方(FCC)结构,(111)晶面衍射峰消失,在(200)晶面择优取向且向小角度方向偏移;不同氮氩流量比下AlCrTiVNbN薄膜表面光滑、平整无孔隙,截面呈现典型的柱状结构。硬度(H)、弹性模量(E)、H/E、H3/E2随氮氩流量比的增加先增大后减小,氮氩流量比为3∶4时薄膜具有最高的硬度和弹性模量;摩擦因数和磨痕宽度随着氮氩流量比的增加先减小后增大,氮氩流量比为3∶4时摩擦因数和磨痕宽度最小,薄膜具有良好的耐磨性。AlCrTiVNbN薄膜的磨损机制为磨粒磨损、黏着磨损和氧化磨损。摩擦学性能改善的原因有2个:一是溅射过程中合金元素与N原子形成氮化物,具有固溶强化效应,有助于强化薄膜的性能;二是薄膜具有较高的H/E和H3/E2,具有较好抵抗弹性变形和塑性变形的能力,有助于改善薄膜摩擦学性能。AlCrTiVNbN high-entropy alloys nitride films were deposited on 304 stainless steel surface using magnetron sputtering method.The microstructure,mechanical properties and tribological properties of the film were studied under different flow ratios of nitrogen and argon.The results show that AlCrTiVNbN film has face-centered cubic structure,the diffraction peak of(111)crystal plane disappears and(200)crystal plane shows preferred orientation and shifts to small angle.The surface of AlCrTiVNbN film is smooth,flat,and no pores and the cross-section presents a typical columnar structure under different flow ratios of nitrogen and argon.With the increasing of flow ratios of nitrogen and argon the hardness(H),elastic modulus(E),H/E,and H3/E2 firstly increase and then decrease.When the flow ratios of nitrogen and argon is 3∶4,the film has the biggest hardness and elastic modulus.With the increasing of flow ratios of nitrogen and argon,the friction coefficient and the width of wear track firstly decrease and then increase.When the flow ratios of nitrogen and argon is 3∶4,the friction coefficient and the width of wear track are the minimum,and the film has good wear resistance.The wear mechanism of AlCrTiVNbN film is abrasive wear,adhesive wear,and oxidation wear.There are two reasons of improving the tribological properties.Firstly,the metal element and N element form metal nitrides during the sputtering process,which means the film has a solid solution strengthening to enhance the mechanical properties.Secondly,the film has higher H/E and H3/E2,which means the film has better ability of resisting elastic and plastic deformation to improve the tribological properties of the film.

关 键 词：AlCrTiVNbN薄膜 磁控溅射 摩擦学性能 氮氩流量比 薄膜结构 

分 类 号：TH117.1[机械工程—机械设计及理论] TG174[金属学及工艺—金属表面处理]