基于可调电边界的低压微波等离子体调控研究  

Research on Low-pressure Microwave Plasma Control Based on Adjustable Electrical Boundary

作　　者：韩嘉辉 王诚卓 郭朝杰 杨阳[1] HAN Jia-hui;WANG Cheng-zhuo;GUO Chao-jie;YANG yang(College of Electronics and Information Engineering,Sichuan University,Chengdu 610065,China)

机构地区：[1]四川大学电子信息学院,四川成都610065

出　　处：《真空电子技术》2025年第2期53-58,共6页Vacuum Electronics

基　　金：四川省科技计划项目(2024YFHZ0182)。

摘　　要：相较于射频等离子体,微波等离子体由于激发波长短、谐振腔内驻波分布固定的特点,容易引起等离子体分布不均匀及放电易受干扰等问题,进而影响材料处理的一致性。为此,研究了基于可调电边界的微波等离子体调控,通过等离子体的移动来解决传统单模腔激发面积小,处理均匀性差的问题。首先,介绍了等离子体在可调电边界中移动的原理,并设计了一套系统。然后,通过有限元电磁仿真对各结构参数进行优化设计。最后,搭建起微波等离子体实验系统进行实验研究。实验结果表明,通过调节短路面,成功实现了等离子体激发位置的移动,与固定位置激发相比,等离子体可作用的范围增大了约3倍。Compared to radio frequency,microwave has a shorter wavelength.Due to the fixed distribution of standing waves,devices using microwave resonant cavities to excite plasma face issues such as uneven plasma distribution and susceptibility to discharge interference,which ultimately affects material processing consistency.Microwave plasma control based on adjustable electrical boundary is investigated.The problems of small excitation area and poor processing uniformity in traditional single-mode cavities are solved by moving the plasma.Firstly,the principle of plasma movement in adjustable electric boundaries is introduced,and a system is designed.Then,the design of various structural parameters is optimized through finite element electromagnetic simulation.And finally,a microwave plasma experimental system is constructed for further experimental research.The experimental results show that by adjusting the short-circuit surface,the movement of the plasma excitation position is successfully achieved,and the effective plasma interaction range increases by approximately 3 times compared to fixed position excitation.

关 键 词：微波等离子体 材料处理 可调电边界 有限元法 

分 类 号：TN136[电子电信—物理电子学]