具有驻留时间约束和晶圆清洁操作的半导体制造系统调度与优化研究  

Scheduling and Optimization of Semiconductor Manufacturing Systems with Residency Time Constraints and Wafer Cleaning

作　　者：卢艳君 刘兆霆 乔宇龙 潘春荣[3] LU Yanjun;LIU Zhaoting;QIAO Yuong;Pan Chunrong(School of Information Technology,Jiangsu Open University,Nanjing 210000,China;NARI Technology Nanjing Control System Co.,Ltd.,Nanjing 210000,China;School of Mechanical and Electrical Engineering,Jiangxi University of Science and Technology,Ganzhou 341000,China)

机构地区：[1]江苏开放大学信息工程学院,江苏南京210000 [2]国电南瑞南京控制系统有限公司,江苏南京210000 [3]江西理工大学机电工程学院,江西赣州341000

出　　处：《工业工程》2025年第2期91-97,共7页Industrial Engineering Journal

基　　金：国家自然科学基金资助项目(72161019);江苏开放大学“十四五”2023年度科研规划课题资助项目(2023XK005);江苏省高等学校基础科学(自然科学)研究面上项目(22KJB110012,23KJD120002)。

摘　　要：为了确保晶圆质量满足市场需求,晶圆厂商必须对具有晶圆清洁操作的槽式晶圆制造系统中的驻留时间进行严格限制,这种处理方式在半导体制造领域较为普遍。然而,在槽式晶圆制造系统加工多品种晶圆时,晶圆驻留时间的限制与晶圆清洁操作的安排使得调度问题更复杂。为了解决该问题,针对多品种晶圆同时在系统加工的情况,本文首先分析晶圆驻留时间约束与加工室清洁操作对系统调度的影响。然后,基于简单易行的拉式策略开发了一种新的调度方法,其关键在于确定机械手在每一步骤上的等待时间。基于这一思想,推导出晶圆加工需满足的可行性条件,并开发了相应的调度算法实现周期调度。最后,通过实例验证了本文方法的可行性和有效性。To ensure that the quality of wafers meets market demands,wafer manufacturers must strictly control the residency time in tank-based wafer manufacturing systems with wafer cleaning operations,a common process in the semiconductor manufacturing field.However,when processing multiple types of wafers in tank-based wafer manufacturing systems,the constraints of wafer residency time and the scheduling of wafer cleaning operations significantly increase the complexity of the scheduling problem.To address this challenge,we first analyze the impact of residency time constraints and chamber cleaning operations on system scheduling when processing multiple types of wafers simultaneously.Then,by using a straightforward backword strategy,we develope a novel scheduling method,with the key focusing on determining the waiting time of the robot at each step.Based on this approach,feasibility conditions for wafer processing is derived,and a corresponding scheduling algorithm is developed to implement cyclic scheduling.Finally,we provide numerical examples to verify the feasibility and effectiveness of the proposed method.

关 键 词：半导体制造 调度 驻留时间约束 晶圆清洁 

分 类 号：TP278[自动化与计算机技术—检测技术与自动化装置] TN305[自动化与计算机技术—控制科学与工程]