尘埃粒子的半导体激光散射测量  

Aerosol Particle Measurement by Laser Diode Light Scattering

作　　者：黄惠杰[1] 赵永凯[1] 任冰强[1] 程兆谷[1] 杜龙龙[1] 路敦武[1] 

机构地区：[1]中国科学院上海光学精密机械研究所,上海201800

出　　处：《中国激光》2002年第12期1117-1121,共5页Chinese Journal of Lasers

摘　　要：以半导体激光为光源 ,建立了一个可以实时测量空气中尘埃粒子的尺寸与颗粒数浓度的光学系统。根据Mie散射理论 ,计算了该光学系统的光散射响应特性。实验结果表明 ,该系统具有高的计数准确度、计数效率和计数重复性 ,适用于洁净度检测和环境空气中尘埃粒子的粒径分布测量。A laser-diode based optical system which can measure aerosol particle size and concentration was described. The light scattering response characteristics of the system were calculated, based on Mie light scattering theory. The experimental results show that the system has high counting accuracy, efficiency and reproducibility. The system is suitable for verification of cleanliness class and measurement of ambient aerosol size distribution.

关 键 词：尘埃粒子 半导体激光 散射测量 光散射 

分 类 号：TH74[机械工程—光学工程]