长脉冲激光沉积原位生成YBaCuO超导膜  

In Situ Formation of YBaCuO Superconducting Film by Long-Pulse Laser Deposition

作　　者：张甫权[1] 李庠[1] 潘萍 薛瑞君 

机构地区：[1]北京真空电子技术研究所,北京100016

出　　处：《电子学报》1992年第8期80-82,共3页Acta Electronica Sinica

摘　　要：用长脉冲激光(脉冲宽度150μs,波长1.06μm)辐照高温烧结的YBa_2Cu_3O_(7-x)靶,在6Pa的氧气压强下,巳在(100)YSZ单晶衬底上原位生成YBa_2Cu_(?)O_(7-x)超导膜。衬底置于750℃的加热器上,衬底与靶之间的距离5cm,用该法制得的薄膜光亮坚实,正常态呈金属性,零电阻温度为84.7K。用XRD和SEM对薄膜进行了分析研究。In situ formation of YBa2Cu3O7_x superconducting film on (100) YSZ single crystalline substrates by long-pulse laser (150μs , l.06μm) beam shooting at the YBa2Cu3O7-x target has been demo-nstrated. The temperature of substrate heater is 750℃. During deposition, the oxygen pressure in vacuum chamber is about 6 Pa. The thin films prepared by this technique are shiny and strong, and its zeroresi-stance temperature is 84.7K. These films have been analyzed by x-ray diffractometry and scanning elect-ron microscopy.

关 键 词：冲激光沉积 超导薄膜 原位生成 

分 类 号：TN244[电子电信—物理电子学]