基于等厚干涉的轴向空间相干度分析及其在表面形状测量中的可行性探讨(英文)  

Longitudinal Spatial Coherence Analysis Based on the Interpretation of the Fringes of Equal Thickness and its Practical Application for the Surface Profilometry

作　　者：段志辉[1] Golkher Mark Joseph Rosen 小琦宽和 石进信生 武田光夫 张青川[1] 

机构地区：[1]中国科学技术大学力学和机械工程系,合肥230027 [2]Department of Electrical and Computer Engineering,Ben-Gurion University of the Negev [3]Laboratory for Information Photonics and Wave Signal Processing,Department of Information and Communication Engineering, The University of Electro-Communications

出　　处：《实验力学》2002年第4期403-411,共9页Journal of Experimental Mechanics

摘　　要：从等厚干涉的解释出发,推导出了二维空间的相干方程.基于空间相干方程,利用SLM产生了一个新的空间非相干光源.同时提出了新的相移方案,并结合这个新的相移方案,实现了轴向空间距离的探测和干涉条纹的相移.分析了空间方向角对相干方程的影响,并给出了实验验证.通过对非相干光源的参数和特定的空间距离以及空间方向角的匹配,重建了一个具有标准段差的实际物体的表面形状.为光学表面形状测量提供了新的思路.Based on the interpretation for the fringes of equal thickness, we proposed the two dimensional longitudinal spatial coherence function. By manipulating the irradiance of an extended quasimonochromatic spatially incoherent source with a spatial light modulator, we generated a special optical field that exhibits high coherence selectively for a specified location along the optical propagation axis and a specified inclination between the two mirrors. We proved the feasibility of the proposed principle for the application through measuring a real object with the standard step. In particular, we proposed a new phase shift technique without mechanical movement. The quantitative experimental proof of the principle is presented.

关 键 词：表面形状测量 轴向空间相干度 等厚干涉 空间非相干光源 空间光调制器 空间方向角 相移 

分 类 号：O343[理学—固体力学]