利用光密度曲线模型研究CD—R染料旋涂工艺  

Optical Density Curve Model for Studying CD -R Dye Coating Process

作　　者：岳宏达[1] 宾月景[1] 潘龙法[1] 陈垦[1] 

机构地区：[1]清华大学光盘国家工程研究中心,北京100084

出　　处：《信息记录材料》2003年第1期3-6,28,共5页Information Recording Materials

摘　　要：染料旋涂是CD—R复制中的核心工艺 ,旋涂的结果影响最终的盘片质量。光密度曲线代表了旋涂结果。利用光密度曲线模型分析旋涂工艺中的许多重要参数 ,从而控制盘片质量。利用专用仪器测试出旋涂后盘片的光密度曲线 ,并对曲线进行分段性拟合。新曲线具有 4个特征点和 3个特征线段 ,利用这些特征进行工艺分析。The dye coating is the key part in CD -R replication technique,because the coating result has a significant effect on the final disc quality.Optical density(OD)curve represents the result of dye coating,it can be used as an analysis tool of many important parameters in the coating process,thereby control the disc quality.The optical density curve of the disc after coating is measured with the ETA RT and then divided into several sections to line fitting.The new curve has 4 characteristic points and 3 characteristic line sections,which can be used to make process analysis.

关 键 词：染料旋涂 光密度 曲经模型 工艺参数 

分 类 号：TQ610.1[化学工程—精细化工]