可定量测量的透射式微分干涉显微系统  

Transmitted-light differential interference contrast microscopy system for measuring transparent surface topographies

作　　者：徐毓娴[1] 蔡昕[1] 董小满[1] 李文江[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《清华大学学报（自然科学版）》2003年第2期149-151,共3页Journal of Tsinghua University(Science and Technology)

基　　金：国家自然科学基金资助项目(59975052)

摘　　要：为满足透明体表面形貌定量测量的需要,研制成功了透射式微分干涉显微测量系统,该系统包括透射式微分干涉显微镜,CCD摄像机,检偏器旋转驱动部件,计算机及相关测量软件。介绍了测量原理、公式、相移干涉方法以及将一台普通反射式干涉显微镜,改装成透射式微分干涉相衬显微镜的关键技术。利用改装好的装置对几种透明体的形貌进行了重构。结果表明:该系统较好地解决了透明体表面形貌的重构问题,在一般实验室条件下,无须采取任何隔振和环境控制措施,测量系统重复性、稳定性均优于2nm,测量范围不受半个波长的限制,有广阔的应用前景。A novel transmittedlight differential interference contrast (DIC) microscopic measurement system was developed to measure transparent object surface topographies. The system includes a transmittinglight DIC microscope, a CCD camera, rotating driving components, a computer and measurement software. The measurement theory and phase shift interference method are described along with the method to transform a common reflectlight interference microscope to a transmittedlight DIC microscope. The results of reconstruction experiments show that the measurement system can be used for qualitative and quantitative measurements of transparent specimens and is insensitive to vibration and variation of environmental conditions. Both the repeatability and instability errors of the system are less than 2 nm.

关 键 词：定量测量 透射式微分干涉显微系统 相移 表面形貌 测量原理 非接触光学测量 

分 类 号：TH742.5[机械工程—光学工程]