离子注入通道波导的制备和分析  

Fabrication and Analysis of Ion-implantation Channel Wavequide

作　　者：石洪军[1] 马俊芝[1] 范俊清[2] 许承杰[2] 

机构地区：[1]长春光机学院 [2]中科院长春物理所

出　　处：《光电子．激光》1992年第3期152-157,共6页Journal of Optoelectronics·Laser

摘　　要：本文报道了B^+离子注入熔融石英玻璃通道波导的制备,并对所制作的通道波导进行分析、测量和计算。In this paper, the fabrication of channel waveguide by B^+ ion-implantation to quatz glass was reported. An approximate theory was put forward to analysis the low side diffusion channel waveguide, and the parameters of the channel waveguide were mearsured and calculated.

关 键 词：波导 制造 离子注入 测量 计算 

分 类 号：TN814.05[电子电信—信息与通信工程]