旋转检偏器移相的微分干涉显微镜  

A Differential Interference Microscope Using a Rotating Analyzer for Phase Shifts

作　　者：高宏[1] 薛实福[1] 李庆祥[1] 严普强[1] 

机构地区：[1]清华大学精密仪器系,北京100084

出　　处：《光学仪器》1992年第5期1-5,共5页Optical Instruments

摘　　要：提出了一种干涉相位差与检偏器方位角成线性关系的新型微分干涉显微镜,利用相移干涉技术,可定量测量样品的表面形貌及粗糙度参数,系统的垂直和横向分辨率分别为1nm和0.5μm。A new type of differential interference microscope has been developed. The phase difference between two interfering beams m the microscope is linear with the azimuth angle of an analyzer. Using PSI(phase shifting interferomerry), the microscope provides quantitative determination of surface topography and surface roughness. The vertical resolution of the instrument is better than 1nm and its lateral resolution is less than 0.5um.

关 键 词：微分干涉 显微镜 旋转检偏器 

分 类 号：TH742[机械工程—光学工程]