MEMS中几何量的测试方法  

Measurement Methods of Geometric Characteristics in MEMS

作　　者：李智[1] 王向军[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院精密测试技术与仪器国家重点实验室,天津300072

出　　处：《微细加工技术》2003年第1期51-56,共6页Microfabrication Technology

摘　　要：MEMS测试技术及方法是MEMS设计、制造、仿真及质量控制和评价的关键环节之一,讨论了应用于MEMS几何量测量的微视觉、扫描探针、光切、干涉、共焦、光栅投影等方法及基于材料和微结构特性的特殊测量方法,并详细论述了在MEMS微几何量测量中的微视觉检测原理及方法。结合干涉测量技术的微视觉测试方法能够涵盖从纳米级到毫米级的几乎全部的微几何量分布范围。Precise measurement of geometric characteristics in microelectromechanical systems(MEMS) is one of the most important sections in the processes of design,fabrication,simulation,and evaluation of MEMS. The measurement technologies and methods of geometric characteristics in MEMS, which include the means of microvision,SPM, lightsection,interference,confocal microscope,fringe projection, and some methods based on the properties of the specimen are presented and discussed. The microvision metrology method is discussed in detail. Combining with interferometry,the microvision metrology method can suit almost all the range of the micro geometric dimensions from nanometer to millimeter.

关 键 词：微机电系统 MEMS检测 微视觉检测 

分 类 号：TP271.1[自动化与计算机技术—检测技术与自动化装置]