掩膜法制备薄膜电感  

Film inductors prepared with masks

作　　者：邵新勋[1] 狄国庆[1] 

机构地区：[1]苏州大学物理系,苏州215006

出　　处：《功能材料与器件学报》2003年第1期39-42,共4页Journal of Functional Materials and Devices

摘　　要：采用掩膜方法制备了栅极型薄膜电感,并测试了这些薄膜电感的电感值和品质因数(Q值)在100MHz-10GHz范围的频谱特性。在此频率范围内,两种样品的电感值显示了平稳的频率特性,其数值分别为130nH,155nH;电阻在6GHz以下也保持平稳,分别为31Ω,51Ω,在这个频率以上,由于高频趋肤效应而有一定的增大;Q值在1-6GHz之间在20以上,并且在6GHz附近分别达到最大值160和110。在100MHz-10GHz范围内,这些电学参量的频谱特性符合实际应用的需要。The thin film inductors of meander-type were prepared by using the masks. Frequency-dependences of inductance and quality factor (Q value) for the thin film inductors were studied in arange of 100MHz-10GHz. The inductance for the two samples show flatness in the tested frequency range and the values are 130nH and 155nH. Under 6GHz, the resistance of samples are 31Ωand 51Ω; beyond 6GHz, they become higher due to the skin effect. The quality values are over 20 from 1GHz to 6GHz,the max value are 160 and 110 at about 6GHz. It shows that frequency characteristics of thesefactors can meet the application requirements in the range of 100MHz-10GHz.

关 键 词：薄膜电感 栅极型 磁控溅射 品质因数 

分 类 号：TN405[电子电信—微电子学与固体电子学] TM55[电气工程—电器]