AIN陶瓷氧化行为的研究  

Oxidation Behavior of Aluminium Nitride

作　　者：许昕睿[1] 严伟林[1] 庄汉锐[1] 李文兰[1] 徐素英[1] 

机构地区：[1]中国科学院上海硅酸盐研究所,上海200050

出　　处：《无机材料学报》2003年第2期337-342,共6页Journal of Inorganic Materials

基　　金：国家自然科学基金(69836030)

摘　　要：探索了AIN陶瓷在不同烧结气氛、湿气及不同温度下的氧化行为和机理.结果表明:湿气的存在显著地影响了AIN陶瓷的氧化行为,1225℃,AIN陶瓷在湿氮气、湿氮气:氧气=10:1及湿空气条件下的氧化遵循抛物线性规律,而干空气条件下遵循线性规律;空气中氧化时,AIN陶瓷的氧化曲线在1100～1300℃表现为线性,当温度超过1300℃时,氧化曲线表现出抛物线性的规律,其线性氧化过程的反应活化能为233kJ/mol.The effects of atmosphere and humidity at different temperatures on the behavior of aluminium nitride were investigated. The resules obtained show that the oxidation behavior was greatly affected by the humidity. The oxidation of aluminium nitride at 1225degreesC in wet N-2, wet N-2:O-2=10:1 and wet air follows a parabolic rate law, while the oxidation in dry air follows a linear rate law. On the other hand, the oxidation kinetics in dry air is linear between 1100degreesC and 1300degreesC with an activation energy of 233kJ/mol, and then parabolic above 1300degreesC.

关 键 词：ALN陶瓷 氧化行为 线性规律 抛物线性规律 

分 类 号：TQ174[化学工程—陶瓷工业]