PBII制备TiN_x/DLC多层膜的结构及摩擦学性能  

Structure and tribological properties of TiN_x/DLC filmsprepared by plasma based ion implantation

作　　者：李光[1] 孙跃[1] 夏立芳[1] 高超 

机构地区：[1]哈尔滨工业大学材料科学与工程学院,黑龙江哈尔滨150001

出　　处：《材料科学与工艺》2003年第1期20-24,共5页Materials Science and Technology

基　　金：高等学校博士学科点专项科研基金资助项目(97021312).

摘　　要：采用等离子体基离子注入技术在30CrMnSi钢上制备了TiNx/DLC多层膜,通过X射线光电子谱和激光喇曼光谱测试分析了膜的结构特征,TiNx/DLC膜大气下的摩擦性能在球盘式摩擦磨损试验机上进行.结果表明:DLC膜的结构强烈依赖于基板脉冲偏压,-5kV制得的DLC膜具有较多的C-H键结构,因而硬度最低,仅有8 3GPa;而-15kV的DLC膜由于含有较多的sp3键,获得了最高的显微努氏硬度(23 6GPa).DLC膜与GCr15钢球大气下的摩擦因数为0 17左右,其磨损性能由于TiNx过渡层引入而显著提高.The structure and tribological properties of TiNx/DLC films was investigated. Plasma based ion implantation (PBII), a rapidly developing technique which improves the adhesion of DLC coatings to steel for creating a compositionally graded interface, was used to prepare TiNx/DLC multilayer films on 30CrMnSi steel at nearly room temperature. The structural features of TiNx/DLC films were examined by X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Tribological properties between TiNx/DLC films and GCr15 steel ball were investigated in ball-on-disk tribometer under ambient air. It was shown that the structure of DLC films was strongly depended on the pulse bias. The DLC films prepared with-5 kV pulse bias, which contains more C-H bonds, display lowest hardness value (83GPa). The DLC films deposited with-15 kV pulse bias contains the highest density of sp3bonds along with high hardness (236GPa). The friction coefficients of DLC films when sliding against GCr15 ball was about 017. The wear resistance of DLC films was increased owing to the TiNx interlayer between steel substrate and DLC films.

关 键 词：PBⅡ TiNx/DLC多层膜 结构 等离子体基离子注入 DLC膜 喇曼光谱 摩擦性能 类金刚石碳 30CRMNSI钢 氮化钛 

分 类 号：TG174.444[金属学及工艺—金属表面处理]