过滤电弧沉积的TiN/TiCrN/CrN/CrTiN多层膜  

TiN/TiCrN/CrN/CrTiN multilayer hard coatings deposited by filtered cathode vacuum arc

作　　者：李成明[1] 张勇[2] 李桂英[2] 曹尔妍[2] 吕反修[1] 

机构地区：[1]北京科技大学材料科学与工程学院,北京100083 [2]中国科学院力学研究所,北京100080

出　　处：《中国有色金属学报》2003年第1期167-171,共5页The Chinese Journal of Nonferrous Metals

摘　　要：用过滤电弧技术在高速钢表面沉积了TiN/TiCrN/CrN/CrTiN多层膜 ,用扫描电镜 (SEM )观察了截面和断口形貌及划痕后的形貌。使用俄歇电子谱仪进行剥层成分分析 ,用纳米压痕仪测试了多层膜和单层膜的显微硬度和弹性模量。结果表明 ,在调制周期大于 10 0nm时 ,多层膜的显微硬度符合Hall Petch关系 ,在 80nm时 ,则脱离线性关系。划痕法测试多层膜的结合力达到 80N。TiN/TiCrN/CrN/CrTiN multilayer hard coatings were deposited on high speed ste el substrates using a filtered cathodic vacuum arc technique. Morphology and com position were characterized with scanning electron microscopy (SEM) and auger el ectron spectroscopy (AES). Nanoindentation tests were performed to determine for ce-displacement curves which were used to calculate elastic modulus and nanohar dness of coatings as a function of modulation period. It was observed that hardn ess of multilayer coatings was increased with decreasing modulation period. But the values of elastic modulus was less than that of TiN. A deviation from the Ha ll-Petch type of strengthening was observed in TiN/TiCrN/CrN/CrTiN multilayer h ard coatings at 80 nm of modulation period. The result of coatings adhesion was up to 80 N by scratch tester.

关 键 词：过滤电弧沉积 显微硬度 结合力 多层膜 

分 类 号：TG174.442[金属学及工艺—金属表面处理]