非晶态WO_3薄膜电致变色特性的研究  

Study on electrochromic performances of amorphous WO_3 films

作　　者：代富平[1] 吕淑媛[1] 冯博学[1] 蒋生蕊[1] 陈冲[1] 

机构地区：[1]兰州大学物理系

出　　处：《物理学报》2003年第4期1003-1008,共6页Acta Physica Sinica

基　　金：国家自然科学基金 (批准号 :698760 18)资助的课~~

摘　　要：采用射频溅射三氧化钨粉末靶的技术 ,在不同的氧分压条件下沉积得到非晶态WO3电致变色薄膜 ,分析得知氧分压为 1∶10的样品变色性能更好些 .采用x射线衍射 (XRD) ,原子力显微镜 (AFM) ,伏安特性曲线和分光光度计分析所制备薄膜的特性 .将薄膜在 1 5mol L的LiClO4 的丙稀碳酸脂 (PC)溶液进行电化学反应 .发现氧分压在 1∶10的情况下沉积得到的薄膜呈非晶态 ,薄膜有较多的孔隙 ,这有利于Li+ 的抽取 ,进而显示出很好的变色性能 .x射线光电子能谱 (XPS)成分分析表明WO3薄膜在原态中只有W和O两种原子电色反应后的主要成分为LixWO3,它是W6 + 和W5+ 的混合价态的钨青铜 .分别在 2 30和 4 0 0℃热处理 90min ,分析表明在 4 0 0℃热处理后循环A series of WO 3 films are prepared by rf sputtering under different partial pressures of oxygen. It is found that the films with oxygen partial pressure ratio 1∶10 have better electrochronic(EC) properties than others. Microstructural and compositional characteristics of WO 3 films are studied by x\|ray diffraction, atomic force microscopy and x\|ray photo electro spectroscopy. It is obvious that the samples are amorphous and have more pores that are beneficial for Li + to inject and eject. The original state films are composed of tungsten and oxygen. After electrochemical reactions, the main component becomes Li x WO 3 in which tungsten ions normally exhibit both W 6+ and W 5+ oxidation states. The films are annealed in air at 230 and 400℃ for 90 min. The cyclic voltammograms and optical transmittance show that the films annealed at 400℃ after more than 10 cycles present better EC properties.

关 键 词：三氧化钨薄膜 非晶态 射频溅射 电致变色 W03薄膜 光学性能 

分 类 号：O484.41[理学—固体物理]