电真空器件程控排气的研究  

Research on programme control of electrovacuum device

作　　者：米伦[1] 史愚砾[1] 石磊[1] 

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621900

出　　处：《真空》2003年第2期54-56,共3页Vacuum

摘　　要：简要介绍了应用单片机实现电真空器件的程控真空排气,优化了工艺,保证了真空排气工艺的一致性和稳定性,提高了产品的质量。其程控系统设计合理,抗干扰能力强,操作简便。An electrovacuum device exhaust system controlled by the program of singlechip computer is reported briefly. This technique ensures the consistency and the stability of vacuum exhaust, moreover, enhances product quality. The whole system is provided with the advantage of the strong antijamming capability, the reasonableness in design and the convenience in operation. 

关 键 词：真空器件 程序排气 真空度 

分 类 号：TN108[电子电信—物理电子学]