微型风速风向传感器研制  

Development of wind speed and direction transducer

作　　者：李艳杰[1] 高成臣[1] 文彬[1] 

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001

出　　处：《传感器技术》2003年第3期25-26,29,共3页Journal of Transducer Technology

摘　　要：阐述了微型风速风向传感器的工作原理,结构设计及工艺研究,该传感器采用硅微机械加工技术制成微悬桥结构,将加热电阻器与感温电阻器排布在悬桥上,降低了功耗,提高了传感器灵敏度,实现低风速风场测量。?The principle,structure design and manufacture process of a wind speed and direction transducer is described.A microbridge is suspended on a slilicon flow channel by micromachining.Heating resistor and thermal resistors are set on the bridge.By used of microbride can largely reduce consumption and enhance sensitivity.This device suit to detect flow air velocity.

关 键 词：硅微桥 风向 风速 传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]