一种高成功率的薄膜截面TEM样品制备方法  

A High Success Rate Preparation Method for Cross-sectional TEM Specimens of Films

作　　者：尚海龙[1,2] 戴嘉维[2] 马冰洋[2] 张安明[2] 廉政[1] 李荣斌[1] 李戈扬[2] 

机构地区：[1]上海电机学院机械学院,上海200245 [2]上海交通大学金属基复合材料国家重点实验室,上海200240

出　　处：《理化检验（物理分册）》2015年第4期256-258 266,266,共4页Physical Testing and Chemical Analysis(Part A:Physical Testing)

基　　金：国家自然科学基金青年基金资助项目(51401120);上海市大学生创新活动计划资助项目(2013scx30)

摘　　要：截面样品的制备是采用透射电镜(TEM)观察薄膜微结构的关键之一,该文分析了采用离子减薄法制备薄膜截面TEM样品成功率低的原因,并对原有方法进行了改进,提出了一种粘贴优半圆环遮挡单边离子束,防止待观察薄膜被正面轰击的薄膜截面TEM样品制备方法,该方法不仅操作简便,而且可大大提高制样成功率。Cross-sectional specimen preparation is a key for thin film microstructure observation using TEM.In this paper,the reasons for low success rate of cross-sectional TEM specimen preparation through ion thinning technology were analyzed and an improved method,which could shelter unilateral ion beam to prevent the observed films from positive bombardment,was proposed.The proposed method not only is simple to operate,but also could improve the specimen preparation success rate.

关 键 词：薄膜 TEM 截面样品 样品制备 

分 类 号：TB302[一般工业技术—材料科学与工程] TB383.2