氮离子注入提高金属铍的硬度及磨损性能的研究  

Improvement of hardness and wear properties of beryllium by N+ implantation

作　　者：邱成峰[1] 徐式如 杨治规 

机构地区：[1]西安交通大学,西安710049

出　　处：《核技术》1992年第2期89-91,共3页Nuclear Techniques

基　　金：中国科学院北京中关村测试基金

摘　　要：本文对金属铍进行了不同剂量的氮离子注入,测量了金属铍的显微硬度及磨损性能和摩擦系数随注入剂量的关系曲线;用X射线衍射进行了结构分析,用背散射分析了注入离子的分布;实验结果表明,氮离子注入提高了金属铍的硬度和耐磨损性能,降低了摩擦系数,当剂量为5.4×10^(17)ion/cm^2时效果最佳。Beryllium metal was implanted by N+ with different doses. The relationship between implantation dose and wear rate or microhardness was determined experimentally. The surface structure of the specimen was analysed by X-ray diffraction and the profile of implanted ions was obtained by RBS.Results show that the specimens after implantation have higher microhardness and lower wear rate, and the best implantation dose is 5.4×1017ion/cm2.

关 键 词：硬度 磨损性 氮 离子注入 铍 

分 类 号：TL342[核科学技术—核技术及应用]