定向碳纳米管阵列在石英玻璃基底上的模板化生长研究  

Patterned Growth of Well-aligned Carbon Nanotube Arrays on Quartz Substrates by Chemical Vapor Deposition

作　　者：张先锋[1] 曹安源[1] 孙群慧[1] 徐才录[1] 吴德海[1] 

机构地区：[1]清华大学机械工程系,北京100084

出　　处：《无机材料学报》2003年第3期613-618,共6页Journal of Inorganic Materials

基　　金：973国家重点基础研究项目(G20000264-04)

摘　　要：分别以带有刻痕的石英玻璃和溅射过Au膜的石英玻璃为生长基底,通过催化裂解二茂铁和二甲苯混合物的方法,在基底上制备出了模板化的定向碳纳米管(CNT)阵列,扫描电镜(SEM)和透射电镜(TEM)观察表明:在这两种基底上生长的定向碳纳米管阵列的模板化程度都很高,其中的碳纳米管多为直径在20～50nm的多壁管(MWNT),且具有很好的定向性。本文还分析、对比了基底材料对定向碳纳米管生长的影响,初步探讨了定向碳纳米管模板化生长的形成机制。Patterned and well-aligned carbon nanotube (CNT) arrays were synthesized by chemical vapor deposition on quartz glass with notches or sputtered Au film. Ferrocene was' used to produce Fe catalyst particles, and xylene was selected as the hydrocarbon source, Scanning electron microscopy (SEM) and transmission electron microscopy (TE M) examinations show thatthe arrays are in ordered patterns, in which the CNTs are muti-walled CNTs in good alignment with diameter about 20-50 nm. The influences of-substrate materials on the aligned CNTs were analyzed, and the formation mechanism of patterned arrays was discussed. Patterned CNT arrays have potential applications in many fields such as, flat panel displays, micro-electronic devices, nanocomposites, etc.

关 键 词：碳纳米管 模板化生长 化学气相沉积 定向阵列 

分 类 号：TB383[一般工业技术—材料科学与工程] TQ127[化学工程—无机化工]