采用显微拉曼光谱技术检测激光微加工质量  

Quality Inspection of Laser Micro-processing with Using Micro-Raman Spectroscopy

作　　者：蒋毅坚[1] 荆涛[1] 陈涛[1] 

机构地区：[1]北京工业大学国家产学研激光技术中心,北京100022

出　　处：《光散射学报》2003年第1期10-14,共5页The Journal of Light Scattering

基　　金：国家重点基础研究发展规划资助项目(编号:G2000067205)

摘　　要：本文简要介绍了准分子激光微加工的原理;分析比较了几种微检测技术的特点和用途;提出了采用显微拉曼光谱检测准分子激光微加工质量的新技术,并在有机玻璃和光刻胶制成的齿轮上分别进行了探索。研究结果表明:显微拉曼散射技术确实可以成为一种新的检测微加工质量的有效手段。In paper, the principle of excimer laser microprocessing was introduced. Some kinds of technology for microinspection were analyzed and compared. A new technology for quality inspection of excimer laser microprocessing with using microRaman spectroscopy was proposed and tried on the micro gears of plexiglass and PMMA. The research results show that the microRaman scattering technology is really a new and effective method for quality inspection of microprocessing.

关 键 词：准分子激光微加工 显微拉曼光谱技术 质量检测 加工质量 微电子机械系统 

分 类 号：TG665[金属学及工艺—金属切削加工及机床] TH161[机械工程—机械制造及自动化]