飞秒脉冲的激光损伤及微加工  

Laser ablation and micromachining with femtosecond laser pulse

作　　者：刘青[1,2] 程光华[3] 陈国夫[3] 

机构地区：[1]宁夏大学物理电气信息学院 [2]中国科学院西安光机所瞬态光学国家重点实验室,陕西西安710068 [3]中国科学院西安光机所瞬态光学国家重点实验室

出　　处：《宁夏工程技术》2003年第2期186-189,共4页Ningxia Engineering Technology

基　　金：中国科学院创新基金资助项目

摘　　要：飞秒激光脉冲是对光学物质进行各种处理的最有效的工具.飞秒激光脉冲与光学物质的相互作用具有较低的激光损伤阈值、有限的热作用范围和高的加工精度等优点.文章讨论了超短脉冲激光导致物质损伤和消融的物理机理,对短脉冲和长脉冲的消融机理进行了对比,介绍了飞秒脉冲产生的啁啾脉冲放大(CPA)技术;飞秒脉冲激光在逐位式光数据存储、对光学物质进行微加工和制作光子元件(如波导等)的应用实验.总结了对飞秒脉冲激光在光学物质相互作用中的应用前景.There are many advantages in the inte raction between femtosecond pulses and optics material,such as,reduced laser-induced breakdown threshold,a very limited heat-affected volum e,and high precision.It is the most e ffective tool of precise micromachining.Mechanisms of ultr ashort pulse laser ablation of materials is discussed,and the differences of ablation mechanism between long laser pulses and femtosecond pulses are discussed.The generation and amplification are illustrated.Some experi-ments on application of femtosecond laser pulse in optics data storage,m icromachining in optics materials a nd manufacture of optics component such as wave-guide,are presented.The outlook of poten tial applications of ultrashort lasers in optics materials is concluded finally.

关 键 词：飞秒激光脉冲 激光损伤 微加工 消融机理 透明介质 

分 类 号：TG665[金属学及工艺—金属切削加工及机床]