微型反射式横向位移光纤传感器研究  

Research of A Novel Reflective Fiber Optic Sensor for Measuring Transverse Displacement

作　　者：柴宝德[1] 徐峰[1] 褚渊[1] 

机构地区：[1]清华大学精密测试技术及仪器国家重点实验室,北京100084

出　　处：《光电子．激光》2003年第6期587-589,共3页Journal of Optoelectronics·Laser

摘　　要：提出了一种测量横向位移的微型反射式光纤传感器,可用于测量物体相对传感器轴线垂直方向的微位移变化量。从光纤出射光场的光强分布函数出发,用数值积分的方法求解出了反射式横向位移传感器的光强调制曲线,进而设计了光纤传感探头和电路。结果表明,传感器的测量线性范围是1mm,分辨率达1μm。A novel reflective fiber optic sensor for measuring transverse displacement,which can measure microdisplacement that vertical to axis of sensor,was presented.On the basis of the intensity distribution of the output optical field formed by the source fiber end,the intensitymodulated curve of reflective transverse displacement fiber optic sensor was obtained by numerical integral method.The probe of fiber optic sensor and circuit was designed by the theory reasoning.The study shows that the linear field of the sensor is 1 mm and the resolution of sensor is 1 μm.

关 键 词：光纤传感器 横向位移 反射式 微位移 光强调制曲线 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH822[自动化与计算机技术—控制科学与工程]