传感器固有频率和阻尼对冲击加速度检测的影响  

Effect of eigenfrequency and damping of the accelerometer on high g shock measurement

作　　者：王钻开[1] 陆德仁[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050

出　　处：《功能材料与器件学报》2003年第2期161-164,共4页Journal of Functional Materials and Devices

基　　金：国家基础研究973微光机电系统研究(G1999033101;G1999033103)

摘　　要：研究了硅微机械高g(g为重力加速度)加速度传感器的固有频率和阻尼特性对冲击响应的影响。传感器固有频率低,阻尼小时,冲击加速度的响应波形包含传感器共振波,造成测量干扰。采用有适当阻尼,固有频率高的双质量块结构高g加速度传感器,进行接近2万g加速度峰值的一系列落杆冲击实验,都未见共振响应。同样的传感器制作成欠阻尼,进行实验时,发现共振干扰。该实验所用的传感器芯片面积小,固有频率高,调整该结构的弹性梁厚度,可制作量程为2×103g～2×105g的加速度传感器。The effects of the eigenfrequency and damping of a silicon micromachined accelerometer on the shock test were investigated. Low eigenfrequency and light damping will lead to the presence of ringing in the shock test, which disturbs the real response of the shock. Shock experiments up to 20000g were conducted for the accelerometer with high eigenfrequency and appropriate damping ratio, no ringing is found. The ringing happens whereas the accelerometer is nearly undamped. The structure of the ac- celerometer used in the shock experiments,with small size and high natural frequency,can cover various acceleration ranges from 2000g to 200,000g depending on the thickness of the plate and the beams.

关 键 词：硅微机械 固有频率 阻尼 加速度传感器 冲击响应 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH824.4[自动化与计算机技术—控制科学与工程]