基于微机械工艺的平面微电机的研究  

Study on MEMS Based Planar Micromotor

作　　者：郭占社[1] 吴一辉[1] 张平[1] 梁静秋[1] 

机构地区：[1]中国科学院长春光机所应用光学国家重点实验室,长春130022

出　　处：《微细加工技术》2003年第2期64-68,75,共6页Microfabrication Technology

摘　　要：为提高微电机的输出力矩,增加微电机散热能力和电流密度,提高电机工作效率,设计了一种具有双转子结构的平面微电机。两个转子对称分布于定子两侧。转子采用永磁体进行轴向充磁。定子为平面线圈,是采用硅微机械加工技术和LIGA工艺制作的。线圈之间则采用了三相星形连接方式,线圈结构为平面型、无槽、集中绕组。把制作好的定子和转子装配后通以三相方波电流进行驱动,通过对其输出力矩和转速的测试证明电机运转良好。A planar micromotor with double rotors is designed in order to increase the output torque, ability of heat radiation, current density and working efficiency. There are two rotors that distribute at two sides of the stator symmetrically. Rotors are made with permanent-magnet material that are magnetized axially. Planar windings manufactured by LIGA technology and silicon micromachine technology are connected with three-phase wye connection. The coils of the stator are made with planar, groveless concentric windings.The micromotor is drived by three-phase square wave current. It is verified that the micromotor works very well through the test of output torque and rotary speed.

关 键 词：平面微电机 转子 定子 微机械工艺 LIGA 

分 类 号：TM38[电气工程—电机]