两步压入法——薄膜力学性能的可靠测量方法  

TWO-STEP PENETRATION-A RELIABLE METHOD FOR THE MEASUREMENT OF MECHANICAL PROPERTIES OF THIN FILMS

作　　者：田家万[1] 韩增虎[1] 赖倩茜[1] 虞晓江[1] 李戈扬[1] 

机构地区：[1]上海交通大学金属基复合材料国家重点实验室,上海200030

出　　处：《机械工程学报》2003年第6期71-74,共4页Journal of Mechanical Engineering

摘　　要：提出了采用力学探针测量薄膜力学性能的两步压入法。该方法通过大载荷压入展示基体变形对薄膜硬度的影响,从而选择不影响基体变形的小载荷测出薄膜的硬度和弹性模量。对高速钢基片上的TiN硬质薄膜,单晶硅片上的金属Ni薄膜和(Ti,Al)N/VN纳米多层膜的测量表明,两步压入法能够测出各种性质薄膜的力学性能,并且具有准确可靠的特点。此外,两步法对(Ti,Al)/VN纳米多层膜的力学性能的测量表明,该体系的纳米多层膜存在硬度和弹性模量异常升高的超硬、超模量效应。A two-step penetration method using the microind-entation technique is presented to investigate the mechanical properties of thin films. According to the method, a larger load indentation is employed to exhibit the influence of substrate deformation and film thickness on the measured hardness values, then a smaller load selected corresponding to the first step and with which the measurement will not be affected by the substrate is applied to measure the authentic hardness and elastic modulus of the films. Experiments with TiN films deposited on high speed steel, metallic nickel films on single silicon and (Ti,Al)N/VN multilayers show that by using this method, the mechanical properties of most different films can be measured accurately and reliably. Additionally, the results of the experiments on (Ti,Al)N/VN multilayered thin films using this method indicate that there exist superhard and supermodulus effects in this system.

关 键 词：薄膜 力学性能 测量方法 两步压入法 纳米多层膜 硬度 弹性模量 

分 类 号：O484.5[理学—固体物理] TB43[理学—物理]