氧化锌薄膜溶胶-凝胶分析  

Sol-gel synthesis of ZnO thin films

作　　者：吕敏峰[1] 崔作林[1] 张志焜[1] 

机构地区：[1]青岛化工学院纳米材料研究所,山东青岛266042

出　　处：《功能材料》2003年第4期433-435,共3页Journal of Functional Materials

摘　　要：　应用sol gel技术,在普通载玻片上制备出透明的ZnO薄膜。由于醋酸锌前驱体在醇中的溶解度小,因此制备过程中,选用了质子化能很强的物质(如乙醇胺)改变了其在醇中的溶解度。本文还通过热分析、红外光谱等手段分析了不同温度下ZnO的sol gel热分解过程,并应用AFM、X射线衍射和UV Vis吸收光谱对sol gel路线制得的薄膜进行表征。实验结果表明:二水醋酸锌 单乙醇胺 异丙醇体系sol gel的热分解过程与纯二水醋酸锌过程的分解大相径庭。ZnO薄膜的sol gel的分解趋于一步完成。预处理温度对ZnO薄膜的性能有显著影响。只有通过控制试验条件,才能保证ZnO薄膜的透光率。Transparent thin films of ZnO have been prepared on ordinary glass substrates (microscope sildes) using the solgel technique.Since zinc acetate dihydrate precursor is hardly dissolved in alcohols,a proton acceptor monoethanolamine (MEA) was used to assist solubility of zinc acetate dihydrate in alcohols (like isopropanol). The thermal decomposition process which occur during the drying and oxide formation were followed by differential scanning calorimetry(DSC),thermal gravimetry (TG).solgel of ZnO thin films was at different temperature also analysed by fourier transform infrared spectra(FTIR).The films which deposited by solgel route were characterized using atomic force microscope(AFM),Xray diffraction and UVVis transmittance spectroscopy. The thermal decomposition processes of solgel from zinc acetate dihydrateMEAisopropanol systems are widely different from that of pure zinc acetate dihydrate.The processes of solgel are inclined to one step.The properties of ZnO thin films were remarkable influenced by preheat treatment temperatures.Transmittance ratio of ZnO thin films become high if experimental conditions were guaranteed.

关 键 词：氧化锌薄膜 sol-gel技术 热分析 红外光谱 热分解 AFM XRD 

分 类 号：TN304.21[电子电信—物理电子学]