干涉仪自适应抗振的空间移相术  

Spatial Phase-shifting Method for Adaptive Vibration-resistant Interferometer

作　　者：吴栋[1] 陈磊[2] 陈进榜[2] 朱日宏[2] 高志山[2] 

机构地区：[1]解放军镇江船艇学院教研室,镇江212003 [2]南京理工大学电光学院,南京210094

出　　处：《光子学报》2003年第8期969-972,共4页Acta Photonica Sinica

基　　金：国防军工计量"十五"重点项目资助 (项目编号 :6 0 80 3134)

摘　　要：根据时域移相算法的概念 ,提出了一种空间移相术 ,它能够检测因外界振动导致条纹抖动而引起的干涉图样的空间相位变化 .运用这种技术在Twyman Green移相式干涉仪中建立了一套自适应抗振系统 ,它可以实时测量振动引起的相位变化大小 ,并通过反馈器件PZT实时校正干涉条纹的相位 ,使得干涉条纹稳定以保证光学测量的正常进行 ,与此同时PZT还作为移相器件 .Based on the conception of the phase-shifting method in time domain, a new technique named spatial phase-shifting method is presented. It can detect the phase variation caused by fringe movement due to the external perturbations. This method is applied to a Twyman-Green phase shifting interferometer in which an adaptive vibration-resistant system has been built. In this interferometer, the fringe phase is calibrated in real time by a piezoelectric transducer (PZT) used as both phase-shifting and motional feedback device, thus fringe pattern is stabilized and the optical testing can be carried out.

关 键 词：空间移相术 自适应抗振 移相式干涉仪 

分 类 号：TH744.3[机械工程—光学工程]