半导体薄膜生长实时监控系统的设计与应用  

Design and Application of Real-time Monitoring System of Semiconductor Film Growth

作　　者：周智猛[1] 徐茵[1] 刘国涛[1] 

机构地区：[1]大连理工大学电气工程与应用电子技术系,辽宁大连116024

出　　处：《计算机测量与控制》2003年第8期585-587,共3页Computer Measurement &Control

基　　金：国家自然科学基金资助项目 (6 9976 0 0 8)

摘　　要：文章分析了半导体薄膜生长工艺流程的特点。在此基础上 ,为实验室的ECR -MOCVD设备设计了一套半导体薄膜生长的实时监控系统 ,介绍了系统的硬件结构以及在WIN98环境下用VB6 0实现生长实时监控系统软件的实现方法。经实验证明 ,系统保证了工艺流程的连续可靠运行 ,实验数据的可靠性和工艺流程的可重复性也大大提高 ,使用方便 ,降低了试验人员的劳动强度 ,实现了预期的设计目标。The process characteristics of growth of semiconductor film are analyzed. Then,a set of real-time monitoring system of semiconductor film growth is designed for the ECR-MOCVD in our lab.The hardware and the realization of system software for real time monitor with VB6.0 based on WIN 98 are introduced. The practical application shows that the growth process can run continuously and stably in this real-time monitoring system. Meanwhile, the accuracy of the experiment parameters and the reproducibility of the growth process are improved significantly.

关 键 词：半导体薄膜生长 实时监控系统 设计 薄膜结构 半导体工业 

分 类 号：TN304.055[电子电信—物理电子学]