石英晶体监控法镀制高精度光学薄膜  

Preparation of high precise optical coating by quartz crystal deposition monitor

作　　者：严晖[1] 胡焕林[1] 孙嵩泉 李万福 

机构地区：[1]合肥工业大学机械与汽车工程学院,安徽合肥230009 [2]普乐(合肥)光技术有限公司,安徽合肥230088

出　　处：《真空》2003年第5期16-18,共3页Vacuum

摘　　要：讨论了石英晶体监控法在光学薄膜镀制过程中的应用原理。通过与常规的光学监控法镀制的膜层相比较 ,证实了石英晶体监控法有助于提高光学薄膜的光学品质。试验表明所镀膜层的光学性能优异 。The principle of the quartz crystal deposition monitor technology in the optical film deposition process is discussed. Compared with the conventional optical deposition monitor coating, the quartz crystal deposition monitor technology is particularly helpful for the optical quality of the optical film. A series of measurements suggest that the optical performance have been drastically improved and will be widely used in the optical communication and the laser industries, and so on.

关 键 词：石英晶体监控法 光学薄膜 镀膜 光学性能 原理 振荡 相位 沉积 

分 类 号：TN304.055[电子电信—物理电子学]