二维PSD器件在两平面(二维)平行度测量中的应用  

Application of two-dimensional type PSD dimensional in two planes in measure in the field of measuring hardness

作　　者：高经伍[1] 赵凤华[1] 陈立军[1] 

机构地区：[1]东北电力学院,吉林吉林132012

出　　处：《煤矿机械》2003年第10期47-49,共3页Coal Mine Machinery

摘　　要：介绍日本20世纪80年代的新产品二维PSD器件“光位敏器”(Position Sensitive Detec-tors)以及LD“半导体激光器”(Semiconductor Laser Detectors),对二维PSD的工作原理进行了分析,讨论了由二维PSD和LD组成的“光-位置传感器”在两平面(二维)平行度测量的可行性,并对由二维PSD-LD组成的“光-位置传感器”在其他领域的应用作了有意的探讨。A new product position detectors(PSD) and semiconductor laser detectors (LD) in 1980 Japan is introduced. This paper analyzes principle of PSD and LD. A possibility that light-position sense detectors composed PSD - LD measures hardness is discussed. Two-dimensional type PSD dimensional in two plane in measure in the field of measuring hardness.It also gives application of light-position sense detectors in other filed.

关 键 词：二维PSD器件 二维平行度 半导体激光器 测量系统 

分 类 号：TG83[金属学及工艺—公差测量技术]