新型非制冷高速高灵敏度红外探测器的研制  

Novel uncooled infrared detector with high speed and high sensitivity

作　　者：刘铮[1] 李兰[1] 邹德恕[1] 杨道虹[1] 徐晨[1] 沈光地[1] 

机构地区：[1]北京工业大学电子信息与控制工程学院北京市光电子技术实验室,北京100022

出　　处：《红外与激光工程》2003年第5期452-455,共4页Infrared and Laser Engineering

基　　金：国家自然科学基金资助项目(69976004和60276033);北京市自然科学基金资助项目(4982005);北京市教委科技发展项目(KM200310005009)

摘　　要：介绍了一种新型非制冷高速高灵敏度硅基电容式红外探测器的工作原理,描述了探测器的设计思想及制作工艺。该探测器采用密封于微气腔的特殊气体吸收红外辐射以改变探测器微电容的原理来进行红外探测,制作工艺采用微机械加工技术。对样品的测试表明这种红外探测器能探测红外信号。A novel uncooled silicon capacitive infrared detector with high speed and sensitivity is introduced.The design idea and fabrication processes of this infrared detector are described in detail. The detector operates on infrared absorption by special gas sealed in a micro\|cavity, which results in its micro\|capacitance change. All fabrication processes are realized by MEMS technology. The experimental results indicate that the prototype samples have good sense of infrared signal.

关 键 词：微机械 红外探测器 非制冷 红外吸收气体 

分 类 号：TN215[电子电信—物理电子学]