射频CO_2激光陶瓷基板划片机  

RF CO_2 Laser Ceramic Substrate Scriber

作　　者：侯廉平[1,2] 陈陪峰[1,2] 陈清明 

机构地区：[1]华中科技大学激光工程研究院,武汉430074 [2]武汉金石凯激光技术有限公司,430074

出　　处：《佛山陶瓷》2003年第10期31-34,共4页Foshan Ceramics

摘　　要：介绍了RFCO2激光器及其陶瓷基板划片的特点;分析了RFCO2激光陶瓷基板划片的机理,给出了整机总体设计方案。对导光系统的激光束进行了模拟,给出了导光系统的光路图及聚焦镜焦平面处的光斑尺寸及能量分布图,整机性能指标达到国外进口机的水平。The characteristic of RF CO 2 laser and its ceramic substrate scribing are pre sented.The mechanism of scribing ceramic substrate by using RF CO 2 laser is analyzed.The design of the scribing system is presented.The laser beam of the delivery system is simulated.The optical circuit of the delivery system,the beam size and its energy distribut ing diagrams are plotted.The laser scribing system has reached the high-level counterpart.

关 键 词：射频CO2激光 陶瓷基板 划片机 RF-CO2激光器 导光系统 激光束 光路图 

分 类 号：TQ174.6[化学工程—陶瓷工业]