锁相倍频式高分辨横向塞曼外差干涉仪  

A High Resolution Heterodyne Interferometer with Transverse Zeeman Laser and Phase-lock Multiple Frequency Technic

作　　者：邱宗明[1] 赵念念[1] 李信[1] 郭彦珍[1] 李康循 

机构地区：[1]陕西机械学院精密仪器工程系

出　　处：《陕西机械学院学报》1992年第1期15-19,69,共5页

摘　　要：阐述了分裂频率约为100kHz的横向塞曼效应激光器及以其为光源的分辨率为10nm的动态式外差干涉仪。仪器应用了国产锁相环器件,采用了专门设计的前馈控制器,使其锁定范围从±15％扩展到±40％,满足了仪器的技术要求。仪器填补了国内高分辨位移动态测量仪的空白。This paper presents a high-resolution heterodyne interferometer. It applied a frequency stabilized transverse zeeman laser, whose frequency difference is 100 KHz. The measurement resolution of instrument is 10 nm. The instrument applied phase-lock multiple frequency technic by a phase-lock IC made in China. A new fore-feed unit is applied in circuit, thereby the phase-lock range is widened from ±15% to ±40%. As a result the instrument can be applied to dynamic displacement measurement. The instrument is made first of all in China.

关 键 词：干涉仪 锁相倍频 激光器 高分辨率 

分 类 号：TH744.3[机械工程—光学工程]