面向MEMS构件在线检测和三维外型测量的立体视觉系统  

Stereovision System for Online-inspection and 3D Measurement of MEMS Components

作　　者：刘盛[1] 刘家豪[2] 傅建中[2] 陈子辰[1] 

机构地区：[1]浙江大学现代制造工程研究所,杭州市310027 [2]浙江大学机械与能源工程学院机械工程学系,杭州市310027

出　　处：《中国机械工程》2003年第22期1936-1939,共4页China Mechanical Engineering

基　　金：国家863高技术研究发展计划资助项目(2002AA421150)

摘　　要：开发了可用于MEMS微制造和微装配过程的一种面向MEMS构件的在线监测和三维外型测量的视觉系统。介绍了该系统的设计、结构、工作原理及实现,并讨论了立体视觉模块的一些关键技术。参考微操作系统的原理,将立体视觉技术引入MEMS构件的检测,实现了由体视显微镜和一个CCD摄像机构建光学系统的三维外型视觉测量系统。实验结果表明,该系统是一种有效的三维检测解决方案。加以少量结构改进,该系统可以用于微制造和微操作过程中对MEMS构件的在线监测和三维外型的视觉测量。An online--inspection and 3D shape--mea-suring system based on stereovision technique was devel-oped for micro fabrication and micromanipulation processof MEMS components. The structure, design, workingprinciple and implementation of the system are intro-duced. Some key techniques of stereovision module in thesystem are discussed. Referring to the principle of micro-manipulation systems, the stereovision technique is ap-plied in inspection and measurement for MEMS compo-nents. A vision system consisted of a stereomicroscopeand a CCD was developed for the measurement of micro--mechanical part in our work. Experimental resultsshow that the system performs well. With a little modifi-cations on the structure, it can be used for online--in-spection and 3D measurement of MEMS components inmicrofabrication and micromanipulation process.

关 键 词：计算机立体视觉 三维外型测量 MEMS构件 微操作系统 

分 类 号：TP23[自动化与计算机技术—检测技术与自动化装置] TB863[自动化与计算机技术—控制科学与工程]