直流磁控溅射BaTiO_3系PTCR元件电极及其性能对比的研究  

Sputtering electrode of BaTiO_3-based PTC thermistors ceramic and electronic properties study

作　　者：周东祥[1] 赵加强[1] 龚树萍[1] 郝永德[1] 

机构地区：[1]华中科技大学电子科学与技术系,湖北武汉430074

出　　处：《功能材料》2003年第6期665-667,670,共4页Journal of Functional Materials

摘　　要：　目前在钛酸钡系PTC热敏电阻器的生产过程中,广泛采用烧渗铝、化学镀镍等电极制备方法,但所制备的电极湿热老化及附着力不尽人意。本文采用直流磁控溅射法制备了的PTCR元件的底电极,实现了镍与PTCR瓷片间的欧姆接触,并发现利用溅射法工艺制备了Ni电极的元件电极附着力(垂直拉力>3kg,剪切拉力>0.5kg)及耐湿热老化性能均得到提高,而且溅射工艺的高成本也得到控制,在生产上实现了批量应用(日产量可达3万片)。To BaTiO_3-based PTCR Ceramics, good ohmic electrode was very important. Experiments indicated that there could form good ohmic contacts between BaTiO_3-based PTCR thermistors and sputtering aluminum, copper, nickel and nickel-based alloys.We compared the properties of PTCR sputtering electrode with others in this paper, and found that sputtering method was a good technique to make electrodes on the BaTiO_3-based PTCR thermistors.At the same time, the experimental results ( including operating costs) were discussed in detail.

关 键 词：PTCR元件 电极 钛酸钡 热敏电阻 直流磁控溅射 电学性能 

分 类 号：TN37[电子电信—物理电子学]