光学工程分析中的镜面面形处理新方法  

New method of mirror surface figure treatment in optical engineering analysis

作　　者：李贤辉[1] 吴清文[1] 杨洪波[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130022

出　　处：《光学技术》2003年第6期752-753,756,共3页Optical Technique

摘　　要：光学系统在载荷的作用下会发生变形。基于干涉检验理论,提出了一种先调整后再拟合的处理方法。首先利用下山法计算光学镜面在法线方向的变形;然后利用Zernike多项式拟合变形曲面得到Zernike系数;最后去除刚体位移,作等高线图。新的数据处理方法可以更好的与干涉检验保持一致。对某相机的主镜进行仿真试验,结果表明,下山法计算效率较高,先调整后再拟合的处理结果与干涉检验结果的一致性较好。Optical system is deformed under load. A new method based on the theory of interference test is presented. A fitting method after alignment is proposed. Firstly, the normal surface error is computed by means of downhill algorithm; secondly, the surface error is fitted at terms of Zernike polynomials, and the Zernike coefficients are attained; finally, contour without the rigid body displacement is processed. The result of new method corresponds to that of interference test. It is shown that downhill algorithm is efficient, and the expected result is gotten by the new method.

关 键 词：光学系统 光学镜面 Zemike多项式 调整 面形误差 下山法 光学工程分析 

分 类 号：TB133[机械工程—光学工程]