功能材料驱动的微执行器及其关键技术  

FUNCTIONAL MATERIAL DRIVING MICROACTUATOR AND ITS KEY TECHNOLOGY

作　　者：贾振元[1] 王福吉[1] 郭东明[1] 

机构地区：[1]大连理工大学机械工程学院,大连116024

出　　处：《机械工程学报》2003年第11期61-67,共7页Journal of Mechanical Engineering

基　　金：国家自然科学基金(50275021);教育部高校博士点专项基金(2000014109)

摘　　要：以新型功能材料为驱动元件的微执行器是精密加工、超精密加工和微机械发展的关键技术之一,对其驱动元件、结构设计、加工制造和精密测控等方面的研究具有重要的科学意义和实用价值。分析了国内外研究热点和具有代表性的压电、形状记忆合金和磁致伸缩材料等功能材料的优异性能及其微执行器的驱动原理和结构特点,阐述了功能材料驱动的微执行器技术的发展趋势,指出了功能材料驱动微执行器技术发展的关键技术。Microactuator droved new type functional material is one of key technologies of precision machining, ultraprecision machining and micro-machinery. Study on microactuator's drive element, structural design, precision control, machining and manufacturing, and so on, is with significance and use value, outstanding properties of piezoelectric material, shape memory alloy and magnetostriction, and driving principle and design feature of microactuator droved above materials is analyzed respectively. Development trend of microactuator technology droved functional material is expounded, and key technologies of development of microactuator droved functional material are indicated.

关 键 词：功能材料 微执行器 驱动技术 精密加工 超精密加工 微机械 

分 类 号：TH86[机械工程—仪器科学与技术] TP215[机械工程—精密仪器及机械]