梳状谐振器的F-I类比宏模型及SPICE分析  

The Macromodel for the Comb Resonator with F-I Analogy Method and Analysis with SPICE

作　　者：闻飞纳[1] 李伟华[1] 戎华[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《固体电子学研究与进展》2003年第3期344-348,共5页Research & Progress of SSE

基　　金：国家 (8 63计划 )资助项目 (课题编号 :2 0 0 2 AA40 40 10 );教育部重大项目 (重大 0 2 16)

摘　　要：分析了双极板静电换能器在小信号激励下极板水平运动的情况 ,推导了适合于 F-I类比的机电关系表达式。由于 SPICE中没有对应此关系式的库单元器件模型 ,对包含有此换能器结构的系统很难进行完整的SPICE描述。对此关系式设计了两种可用 SPICE描述的等效电路 ,以达到梳状谐振器 F-I类比宏模型的整体一致性描述 。The horizontal movement of the parallel electrostatic transducer's plate under a small signal's stimulus is analysed and the electromechanical relationship suit able for F I analogy is deduced in this paper. Because there are no correspond ing models for the relationship in the device cell library of SPICE, it is diffi cult to describe the system completely including this transducer structure in SP ICE language. Two equivalent circuits which can be described in SPICE language a re presented in order to get a complete description to comb resonator's macromod el with the F I analogy method. The verification is given in the latter.

关 键 词：梳状谐振器 F—I类比 宏模型 SPICE分析 MEMS 双极板静电换能器 

分 类 号：TN629.1[电子电信—电路与系统] TN715.2