抗振型移相干涉仪中PZT移相器的改进  

Improvement of PZT phase shifter in vibration-resistant phase-shifting interferometer

作　　者：吴栋[1] 朱日宏[1] 陈磊[1] 何勇[1] 王青[1] 高志山[1] 

机构地区：[1]南京理工大学电光学院

出　　处：《光学精密工程》2003年第6期567-571,共5页Optics and Precision Engineering

基　　金：国防军工计量"十五"重点项目资助(No.60803134)

摘　　要：结合移相式干涉仪主动抗振技术,提出对普通PZT光学移相器进行机械结构的优化,改善其机械响应性能并保证有足够的位移量。作为机电反馈式干涉仪抗振系统的核心部件,改进后的PZT构件用于干涉仪的移相驱动,同时又用作光学相位调制器和振动补偿器。经移相干涉仪的在线测量,PZT移相器达到了1000Hz(振动幅度为λ/2)以上的时间响应速度并获得了6μm左右的位移量,满足了干涉抗振系统的需要。The structure of an ordinary piezoelectric transducer (PZT) used as an optical phase-shifter is optimized using the active vibration-resistance techniques for phase-shifting interferometer to improve its mechanical properties with adequate micro-displacement. As the kernel part of a mechano-electronic feedback system of the vibration-resistant interferometer, the optimized PZT works as an optical phase-modulator and a vibration-compensated controller at the same time. On-line testing shows the new structure of PZT phase shifter has gained a time response above 1 000 Hz at amplitude of (/2, and a displacement of about 6 μm.

关 键 词：移相干涉术 主动抗振 PZT移相器 时间响应 位移 抗振型移相干涉仪 

分 类 号：TH744.3[机械工程—光学工程]