纳米金刚石薄膜的制备特点及特性  

Preparation Peculiarities and Characteristics of Nanocrystalline Diamond Films

作　　者：方静华[1] 项金钟[1] 周桢来[1] 吴兴惠[1] 

机构地区：[1]云南大学材料科学与工程系,昆明650091

出　　处：《材料导报》2003年第10期44-47,共4页Materials Reports

基　　金：云南省自然科学基金(2001E0003Z)

摘　　要：纳米金刚石薄膜具有金刚石薄膜和纳米材料的双重优异特性,而在制备工艺上又与金刚石薄膜有所不同,通过与金刚石作比较,综述了纳米金刚石薄膜的制备特点,表征方法;并列举了其在场发射、耐磨减摩等领域的应用和其独特性能。Nanodiamond films combine the properties of conventional diamond films and nanomaterials, but their preparation techniques are different from those for diamond films. In this paper,the peculiarities of nanocrystalline diamond films' preparation and its characterization methods as compared with diamond are described,and the characteristics and application of nanocrystalline diamond films as field emission materials and wearing resisting materials are reviewed.

关 键 词：纳米金刚石薄膜 化学气相沉积 粗糙度 硬度 化学性质 

分 类 号：TN304.055[电子电信—物理电子学]