利用电容结构改善太赫兹信号与检测器的耦合  

Terahertz signal detector improvement based on capacitive coupling structure

作　　者：徐磊[1] 涂学凑[1] 万超[1] 裴宇峰[1] 康琳[1] 吴培亨[1] 

机构地区：[1]南京大学超导电子研究所,江苏南京210093

出　　处：《太赫兹科学与电子信息学报》2015年第1期27-30,共4页Journal of Terahertz Science and Electronic Information Technology

基　　金：国家高技术研究发展计划资助项目(863计划)

摘　　要：对于THz频段的检测器,当器件的尺寸远远小于检测信号的波长时,可以获得快速的响应速度,但耦合信号的能力会下降。为了提高检测器的信号耦合能力,需要借助天线收集信号。因此天线的性能直接决定着器件的响应频段及灵敏度等参数指标。六氮五铌(Nb5N6)微测热辐射计太赫兹检测器采用平面集成天线的方式来耦合信号,平面天线通过微加工技术,经过光刻、剥离等过程,集成在基片上,Nb5N6置于平面天线的中心。针对0.32 THz的中心频率,尝试采用电容耦合信号的设计方法,提高了Nb5N6的信号耦合能力。A detector can achieve quick response when it is much smaller than the wavelength of the source signal in THz wave band at the expense of signal coupling capability.Therefore, an antenna is applied to collect signals in order to enhance the signal coupling capability of the detector.The properties of antenna determine the frequency response band,the sensitivity and other parameters of the detector directly. A planar-integrated antenna is adopted for signal acquisition in the Nb5N6 microbolometer detector, which is fabricated by lithography,lift-off and other processes of micro-fabrication. The Nb5N6 microbolometer is placed in the center of the planar antenna. Aiming for the center frequency of 0.32 THz, a special capacitive coupling design is proposed to improve the signal coupling capability.

关 键 词：六氮五铌 太赫兹检测器 阻抗匹配 电容耦合 微测辐射热计 

分 类 号：TN821.4[电子电信—信息与通信工程]