微球板电子倍增器基体制备技术研究  

Preparation for Microsphere Plate Electron Multiplier Substrate

作　　者：王新[1] 富丽晨[1] 吴奎[1] 王国政[1] 端木庆铎[1] 李野[1] 姜德龙[1] 田景全[1] 

机构地区：[1]长春理工大学理学院,吉林长春130022

出　　处：《发光学报》2003年第6期654-658,共5页Chinese Journal of Luminescence

摘　　要：新型微球板电子倍增器和微通道板相比具有高增益、无离子反馈、制备简单、造价低廉等优点。介绍了微球板电子倍增器的工作原理、特点和广阔的应用前景。由于微球板基体的形成技术是微球板制备的关键技术,论文从理论上研究了微球板基体烧结过程中的烧结速率。并采用自行设计组分的高铅玻璃,用立式炉成珠设备进行了玻璃微珠的制备,探索了微球板制备过程中玻璃微珠的分级技术、微球板电子倍增器基体成型工艺和技术。制备出基本满足要求的微球板电子倍增器基体。给出了制造的样品和文献上样品结构的SEM对比照片,最后对实验过程中的一些现象进行了分析,并给出了实验的结论。Microsphere plate (MSP) is a compact electron multiplier with temporal and spatial resolving power. It consists of glass beads with diameter of 40 to 60/μm. These glass beads were sintered to form a thin, porous plate. The surface of the glass beads is covered with partially conductive, secondary electron emissive material. The two faces of the plate are coated with conductive electrodes. When voltage is applied between the two electrodes, secondary electron multiplication takes place among the glass beads. MSP is used in vacuum system for the detection of charged particles. Its applications include particle imaging, time-of-light mass spectroscopy, particle monitoring, and electron microscopy. There are several key technologies in the process of fabricating final MSP. First of all, the formation of MSP substrate is the most important, due to the requirement of porosity and strength. The quality of the substrate will directly affects on the quality of final MSP. In this paper an introduction of the operating principle and characteristics of MSP was presented. Based on twin-ball sintering mode, a sintering rate formulation in the sintering process was established. In the actual sintering experiment, this twin-ball mode is superior to the panel-ball mode proposed by Kuczynski, so the sintering rate formulation agrees to the experiment well and can help us to operate technological process properly. In this paper the experimental processes on the formations of glass-beads and MSP body were presented also. The specific experiment included the followings: designed high lead glass as composition which can be used for formatting glass-beads, fabrication of glass-beads with vertical stove which was designed by ourselves, explored sorting technology of glass-bead and technological process of MSP. In the end, some comparison images of the experimental samples were given with that taken from reference. From these images.it will be found that our glass-beads' sphericity is good and sorting technology was well done, the sinte

关 键 词：微球板 电子倍增器 离子反馈 烧结 微通道板 电子增益 输出电流 

分 类 号：TN144[电子电信—物理电子学]