CG─60离子注入机及应用  

CG─60 Ion Implantor and Its Application

作　　者：王宝坤 朱绍华[2] 谭俊[2] 张振学[2] 

机构地区：[1]北京市机电研究院 [2]装甲兵工程学院

出　　处：《表面工程》1995年第3期28-31,共4页

摘　　要：离子束表面改性技术在工业上具有广阔的应用前景。CG─60离子注入机充分考虑了工业应用的要求，离子源束斑大、均匀性好，带电子枪加热镀膜装置的多功能靶室容积大、功能全，多自由度靶盘及卡盘适应范围广，并带有水冷装置。机器功能完善，可进行离子注入、镀膜、反冲注入和离子束辅助沉积等多种工作。利用该设备为六十多个单位的刀具、模具、精密零件等进行了离子束表面强化和改性处理，取得了明显效果，大量实例表明被处理件的耐磨、抗蚀、耐热等性能显著提高，使用寿命提高了1～10倍。Ion beam surface modification is a successful technology in industy. CG─60 ion implantor is made on the basis of full consideration of application in industy, its ion beam is wide and uniform, the vaccum chamber is great and with a multi─functional and cooled substrate holder in it, an evaporator with an electron gun is equipped too. With it, we can successfully finish ion implantation, vaccum plating, ion beam assisted deposition etc. The result of surface strengthening and modification of sixty units’cutters, dies and accurate parts is obvient. their resistence of friction corrosion and heat are strongly improved and their work life are delayed from one to ten times.

关 键 词：离子注入机 离子束表面改性 靶室 靶盘 卡盘 水冷装置 

分 类 号：TG155.5[金属学及工艺—热处理] TG174.444[金属学及工艺—金属学]