衍射光学元件车削补偿技术的研究  

Diamond turning compensation techniques of diffractive optical elements

作　　者：张峰[1] 汪志斌[1] 张云龙[1] 郭小刚[1] 苏瑛[1] 郭芮[1] 

机构地区：[1]西安应用光学研究所,陕西西安710065

出　　处：《应用光学》2014年第6期1058-1062,共5页Journal of Applied Optics

基　　金：国防基础科研计划资助项目(A0920110019)

摘　　要：超精密单点金刚石车削加工是高精度衍射光学元件制造的重要方法,但是以往的加工方法是直接一次车削加工成型,无法实现具有加工-检测-补偿加工-检测的闭环控制特点的超精密加工,从而导致零件精度较低。针对这种加工技术的缺陷,通过研究衍射光学元件金刚石车削过程和面形状误差补偿,对表面轮廓仪实际测量的轮廓数据进行处理,计算出实际车削曲线与理想曲线之间的法向残余误差,以此获得新的金刚石车削加工轨迹,实现衍射光学元件的超精密闭环控制加工。利用单点金刚石车床对口径78的衍射光学元件进行补偿加工试验,最终使其PV值由10.4μm经过一次补偿加工后降为4.3μm。The ultra‐precision diamond turning is a significant way to manufacture high‐preci‐sion diffractive optical elements (DOE);however ,this way is unable to achieve compensation machine currently that results in low er machining accuracy .Based on the study on the process of diamond turning and the compensation of surface shape error ,and on the analysis of actual measurement data by the surface profile ,the normal residual error was calculated between the actual turning curve and the ideal curve to get new machining trace of diamond turning in this paper .The compensation test on DOE of 78 with the diamond turning machine was done ,and finally the value of peak value (PV) converges rapidly from 10 .4 μm to 4 .3 μm .

关 键 词：衍射光学元件 金刚石车削 误差补偿 法向残余误差 

分 类 号：TN205[电子电信—物理电子学]