无磨料低温抛光件表面分形特性  

Fractal character of workpiece surface processed by cryogenic polishing without abrasive

作　　者：高论[1] 连相明[1] 刘向阳[1] 王立江[1] 

机构地区：[1]吉林大学机械科学与工程学院,吉林长春130025

出　　处：《吉林大学学报（工学版）》2004年第1期7-11,共5页Journal of Jilin University:Engineering and Technology Edition

基　　金：国家自然科学基金资助项目(59975043).

摘　　要：利用HL Ⅱ型微机控制原子力显微镜(AFM)系统对无磨料低温抛光件表面的轮廓曲线进行了测量。基于分形理论,分析和讨论了不同工艺参数对表面分形维数D和轮廓算术平均偏差Ra的影响。研究结果表明:D与Ra反映了表面质量的不同方面,它们之间有一定的对应关系,但并不是线性的;对于同样的加工方法,硬质合金材料的D值比铝合金材料的D值大;分形维数可以揭示超光滑表面的表层质量。The profiles surfaces processed by cryogenic polishing without abrasive were obtained by HL-Ⅱ microprocessor controlled atom force microscope and the influences of various processing parameters on the fractal dimension D and the arithmetical mean deviation of profile Ra were investigated. The results show that the D and Ra represent the different aspects of the surface, they correlate each other but do not have linear relationship. For the same working method, the D of hard alloy component surface is bigger than that of aluminum alloy component surface. The fractal dimension may reveal the supersmooth surface quality.

关 键 词：分形维数 无磨料抛光 表面粗糙度 超光滑表面 

分 类 号：TH161.1[机械工程—机械制造及自动化]