Al-50wt% Sn合金的离子溅射研究  

SPUTTERING RESEARCH OF Al-50wt%Sn ALLOY

作　　者：王震遐[1] 章骥平[1] 潘冀生[1] 陶振兰[1] 张慧明[2] 赵烈[2] 曾跃武[2] 王承宝 林祯昌 

机构地区：[1]中国科学院上海原子核研究所,上海201800 [2]杭州大学中心实验室,杭州310028 [3]上海合金厂,上海201800

出　　处：《物理学报》1992年第9期1554-1559,共6页Acta Physica Sinica

基　　金：国家自然科学基金

摘　　要：用捕获膜技术和卢瑟福背散射(RBS)分析,测定Al-Sn多相合金在30keV Ar^+离子轰击时Al和Sn的溅射原子角分布。溅射后的样品用扫描电子显微镜(SEM)进行观察,并用电子微探针分析仪(EPMA)对轰击样品(靶点)和未轰击样品作成分分析。结果表明,Al的溅射原子角分布近于cosine形状,而Sn却是over-cosine型角分布。本文给出一个按不同表面形貌特征划分的各元素富集区i进行叠加的产额表达式,Y(θ)=∑Y_i(θ),解释了实验结果。The angular distributions of sputtered Al and Sn atoms ejected from the Al-Sn multi phase alloy bombarded by 30keV Ar+ ion have been measured with collector technique and RBS analysis. The sputtered surface has been observed with scanning electron microscopy (SEM), and its compositions have been analyzed both in sputtered and unsputtered areas with electron x-ray probe microanalyser (EPMA). The results show that the angular distribution of sputtered Al atoms is nearly cosine, and that of Sn is over-cosine. To explain the experimental results we propose a reasonablt sputtering yield equation, Y(θ) = ∑Yi(θ) each , Yi(θ) stands for the sputtering yield of the area in which its surface topography and compositions is different from other areas.

关 键 词：溅射 合金 角分布 铝合金 

分 类 号：TG17[金属学及工艺—金属表面处理]