二维电容式硅微加速度传感器的刚度求解  

Solution of the stiffness of 2-D capacitive silicon microaccelerometer

作　　者：刘妤[1] 温志渝[1] 张流强[1] 梁玉前[1] 温中泉[1] 李霞[1] 

机构地区：[1]重庆大学光电工程学院

出　　处：《微纳电子技术》2003年第7期289-291,共3页Micronanoelectronic Technology

基　　金：国家自然科学基金资助 (10 1760 40 )

摘　　要：硅微电容式加速度传感器具有灵敏度高、噪音低、漂移小、功耗低、结构简单等优点 ,在军民两用市场中有着广泛的应用前景。本文针对自主开发设计的一种带折叠梁的二维叉指电容式硅微加速度传感器 ,采用力法求解了其主轴刚度 。Capacitive silicon microaccelerometers have a wide application in either commercial or military markets because of their performances such as high sensitivity,low noise,small drift,low power cost and simple structure. In this article,a kind of 2 D capacitive silicon microaccelerometer with the folded beam is designed and its main axis stiffness is caculated using force method,which provides the basis for studying dynamic characteristics of this kind of microaccelerometer.

关 键 词：电容式硅微加速度传感器 刚度 折叠梁 二维叉指 动态响应特性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]