叉指式微硅加速度计的参数化设计  

Design of comb-driving micro-silicon accelerometers based on structure parameters

作　　者：刘宗林[1] 吴学忠[1] 李圣怡[1] 

机构地区：[1]国防科技大学微机电研究中心,湖南长沙410073

出　　处：《微纳电子技术》2003年第7期277-280,共4页Micronanoelectronic Technology

摘　　要：详细阐述了微硅加速度计的原理 ,根据材料力学以及结构动力学原理 ,分析了叉指式驱动 /检测结构的动力学模型 ,推导了等效质量、等效阻尼、等效刚度等关键参数模型 ,分析了灵敏度、横向干扰等和结构参数的关系 ,为微硅加速度计的优化设计与改进提供了理论指导 。The principle of micro silicon accelerometers was investigated. Kinetic models of comb structures were built according to material mechanics and structural dynamics. Models of equivalent mass, equivalent stiffness and equivalent dump were deduced. Relations between sensitivity, cross disturbance and structure parameters were interpreted. These are helpful for the design and optimization of micro accelerometers.

关 键 词：叉指式微硅加速度计 参数化设计 叉指驱动 微机电系统 弹性系数 优化设计 

分 类 号：TH824.4[机械工程—仪器科学与技术] TH-39[机械工程—精密仪器及机械]